Relay-Version: version B 2.10 5/3/83; site utzoo.UUCP Path: utzoo!mnetor!seismo!brl-adm!rutgers!ames!ucbcad!ucbvax!HPLABS.HP.COM!wendy%hplwlf From: wendy%hplwlf@HPLABS.HP.COM (Wendy Fong) Newsgroups: mod.ai Subject: Query - AI for Photolithography Message-ID: <8612130003.AA01824@hplwlf> Date: Fri, 12-Dec-86 18:03:12 EST Article-I.D.: hplwlf.8612130003.AA01824 Posted: Fri Dec 12 18:03:12 1986 Date-Received: Tue, 16-Dec-86 19:11:08 EST Sender: daemon@ucbvax.BERKELEY.EDU Organization: The ARPA Internet Lines: 16 Approved: ailist@sri-stripe.arpa I have been working on a frame and rule-based diagnosis advisor for photolithography (the patterning of integrated circuits). A discription of our system appeared in "An Expert Advisor for Photolithography," IJCAI-85, pp.411-413. I'd like to hear from others who are applying AI techniques, especially expert systems, to the domain of photolithography. Please reply to me directly at the address below. Thanks in advance. Wendy Fong fong@hplabs.HP.COM (ARPA) Hewlett-Packard Laboratories hplabs!fong (UUCP) 1501 Page Mill Road, Palo Alto, CA 94304 (415) 857-5425 -------