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From: wendy%hplwlf@HPLABS.HP.COM (Wendy Fong)
Newsgroups: mod.ai
Subject: Query - AI for Photolithography
Message-ID: <8612130003.AA01824@hplwlf>
Date: Fri, 12-Dec-86 18:03:12 EST
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Posted: Fri Dec 12 18:03:12 1986
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I have been working on a frame and rule-based diagnosis
advisor for photolithography (the patterning of integrated
circuits).  A discription of our system appeared in
"An Expert Advisor for Photolithography," IJCAI-85, pp.411-413.

I'd like to hear from others who are applying AI techniques,
especially expert systems, to the domain of photolithography.

Please reply to me directly at the address below.
Thanks in advance.

Wendy Fong                                  fong@hplabs.HP.COM  (ARPA)
Hewlett-Packard Laboratories                hplabs!fong         (UUCP)
1501 Page Mill Road, Palo Alto, CA 94304    (415) 857-5425

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